SEM を用いた半導体キャリア分布の観察技術.pdfVIP

解析技術 SEMを用いた半導体キャリア分布の 観察技術 p-type n-type ＊ 鶴　見　大　輔 ・浜　田　耕太郎 Dopant Mapping in Semiconductors Using Scanning Electron Microscopy ─by Daisuke Tsurumi and Kotaro Hamada ─This paper investigates the decrease in dopant contrast of semiconductors due to scanning electron microscope (SEM) observation that causes contamination on the semiconductor surface. We have discovered that second electron (SE) high-pas