N0.5i0.5(n,Ti)3薄膜的制备与性能表征讲义.doc

摘 要 本实验采用化学溶液沉积法，在ITO/玻璃衬底上制备了Na0.5Bi0.5(MnxTi1-x)O3（x=0, 0.02, 0.05）三种薄膜。对晶体的结构、形貌、电容-电压和铁电性能进行了测试。结果表明，三种不同掺量的薄膜均为钙钛矿结构；但相比于Na0.5Bi0.5TiO3和Na0.5Bi0.5(Mn0.05Ti0.95)O3这两种薄膜，Na0.5Bi0.5(Mn0.02Ti0.98)O3薄膜的表面比较平整致密，具有典型狭长的蝶型曲线，暗示了具有较强的铁电性能。 另外，通过测量空气、氧气、氮气三种不同的气氛下，Na0.5Bi0.5(Mn0.02Ti0.98)O3薄膜的结晶性和电学性能。结果显示：三种不同的气氛下，Na0.5Bi0.5(Mn0.02Ti0.98)O3薄膜均为单一的钙钛矿结构；电滞回线结果表明，Na0.5Bi0.5(Mn0.02Ti0.98)O3薄膜在氧气气氛下的剩余极化强度最大，为23.10C/cm2；电压-电容的测试结果表明，在氧气气氛下的Na0.5Bi0.5(Mn0.02Ti0.98)O3薄膜的蝴蝶形状较好，且电容的变化率较大。 综上所述，氧气气氛下Na0.5Bi0.5(Mn0.02Ti0.98)O3薄膜具有较好的结晶性和铁电性能。 关键词：化学溶液沉积法；离子掺杂；钛酸铋钠；铁电性能；薄膜 ABSTRACT In this paper, we prepared Na0.5Bi0.5(MnxTi1-x)O3(x=0, 0.02, 0.05) three thin films on the ITO/玻璃 substrates by a chemical solution deposited method. The structure, surface morphology, capacitance-voltage and electrical properties of thin films were tested. The results indicate that all three films with different amount of doped Mn show the perovskite structure. Compared with the Na0.5Bi0.5TiO3,Na0.5Bi0.5(Mn0.05Ti0.95)O3 thin films, Na0.5Bi0.5(Mn0.02Ti0.98)O3 thin film has the smooth and dense surface, and stronger ferroelectric properties with the long narrow butterfly curve. In addition, The crystallinity and the electrical performances of Na0.5Bi0.5(Mn0.02Ti0.98)O3 thin films under the air, the O2, the N2 atmospheres were tested. The results show that the Na0.5Bi0.5(Mn0.02Ti0.98)O3 thin films under different atmospheres have the single perovskite structure with XRD patterns; Polarization-electric hysteresis loops results show that Na0.5Bi0.5(Mn0.02Ti0.98)O3 thin film under the O2 atmosphere has the biggest remnant polarization value that is 23.10μC/cm2 ; The capacitance-voltage results show that the Na0.5Bi0.5(Mn0.02Ti0.98)O3 thin film under O2 show more obvious butterfly patterns with the bigger change rate of the capacitance. In summary, the Na0.5Bi0.5(Mn0.02Ti0.98)O3 thin films under O2 atmosphere shows good crystalline and ferroelectric properties. Key words: Chemical solution decomposition;