改良西门子法制备高纯多晶硅介绍.docVIP

改良西门子法制备高纯多晶硅 摘 要：本文主要叙述了高纯多晶硅的各种制备方法，有三氯氢硅氢还原法、硅烷热分解法、四氯化硅氢还原法、流化床法、物理提纯法等其他制备高纯多晶硅的工艺。[1]其中重点介绍了现在普遍都使用，技术相对成熟的改良西门子法，包括改良西门子法的制备工艺、三氯氢硅的提纯与尾气处理。 关键词:高纯多晶硅；良西门子法；尾气处理 The preparation of high purity poly crystalline silicon modified Siemens Abstract：This paper mainly describes various preparation methods of high purity silicon,hydrogen reduction method,the silicon cross-linked with hydrogen silica thermal decomposition method,silicon tetra chloride hydrogen reduction method,fluidity bed method,physical purification method preparation of high purity poly crystalline silicon and other crafts.