工业等离子体绪论.ppt

Principles and Applications of Industrial Plasma Contents 1 Introduction 1.1 The social role of industrial plasma engineering 1.2 Important definitions 1.3 Plasma physics regimes and issues 2 Kinetic Theory of Gases 2.1 measurement of high vacuum 2.2 particle distribution functions 2.3 particle collisions 3 Motion of Charges in Electric and Magnetic Fields 3.1 Charged particle motion in electric fields 3.2 Charged particle motion in magnetic fields 3.3 Charged particle motion in steady electric and magnetic fields 4 Characteristics of Plasma 4.1 Bulk properties of plasma 4.2 Quasi-neutrality of plasma 4.3 Electrostatic Boltzmann equation 4.4 Simple electrostatic plasma sheaths 4.5 Plasma frequency 5 Electron Sources and Beams 5.1Thermionic emission sources 5.2 Photoelectric emission sources 5.3 Field emission sources 5.4 Hollow cathode sources 5.5 Secondary electron emission sources 5.6 Sources and beams characteristics 5.7 Charged particle beam transport 6 Ion Sources and Beams 7 Dark Electrical Discharges in Gases 7.1 Background ionization 7.2 Saturation regime 7.3 Townsend discharge 7.4 Corona discharges 7.5 Corona sources 7.6 Electrical breakdown 8 DC Electrical Arc Discharges in Gases 8.1 Arc regime 8.1.1 Voltage-Current Characteristic 8.2Phenomenology of electrical arcs 8.2.1 Classical Arc Nomenclature 8.3 Physical processes in electrical 8.3.1 Body forces on arcs 8.3.2 Electrode Jet Formation 9 Inductive RF Electrical Discharges in Gases 9.1 Introduction 9.2 Phenomenology of RF-plasma Interactions 9.3 Skin depth of plasma 9.4 Inductive plasma torch