HM EGUN-6 电子束蒸发源.docVIP

e-Guns TM for Thin Film Optical Coatings 薄膜和光学镀膜电子枪 Hanks HM2TM e-Gun ? Patented, award-winning, modular magnet beam focusing system; higher efficiency, improved beam collimation, no beam ”curl” 一流的专利产品，模块化的永磁电子束聚焦系统；更高的效能，改良的束瞄准，电子束无扭曲 ? Improved emitter and sweep coil assemblies 改良的束发射器和扫描线圈总成 ? 0-200 Hz sweep, repeatable, uniform evaporation, no “tunneling” 0-200Hz扫描，蒸发的重复性、均匀性好，无“沟道” ? Precise and stable evaporation rates to as low as 1-2 A/sec 精确和稳定的蒸发速率，可低至1-2 A/秒 ? 35% smaller than traditional evaporation sources, yet provides the same crucible volume, evaporation rate, and power capability of physically large guns. 比传统的蒸发源小35%，但能提供相同的坩埚容量和蒸发速率， 可使用大容量的电子枪电源 ? High and Ultra High Vacuum compatible 兼容高真空或者超高真空 ? Accessories 相应的配套设备 ? Crucible liners 可用坩埚内衬 Models 型号： ? 6-20kW 7-156cc crucible volumes 功率6-20千瓦，坩埚容量7-156毫升 ? Hydra 10 crucible with 6 emitters, simultanuous/ sequential evaporation of up to six materials Hydra 10个坩埚6个束发射器，同时或连续蒸发多达六种材料 ? Triad 3 crucible source Triad 3个坩埚源 ? Twin 2 crucible source Twin 2个坩埚源 ? Single 1 crucible source Single 1个坩埚源 Rotary旋转式 ? 6-10 kw 7-15 cc crucible volumes 功率为6-10千瓦，坩埚容量7-15 毫升 ? Four crucible 4个坩埚源 Hanks HM2 Single Crucible e-Guns? UHV CompatibleMetal-sealed, fully UHV compatible, measured base pressure: 2 x 10-11 Torr. 兼容超高真空 金属密封，完全兼容超高真空，真空度可达2 x 10-11 TorrSpecifications / 技术规格 Maximum Power 最大电源功率 6 kW 10 kW 15 kW? Crucible volume 坩埚容量 7/10 cc 10/15/40 cc 40/75/100 cc Emission voltage 束电压 7.5 kV 10 kV 10 kV Emission current 束电流 0 to 800 mA 0 to 1.0 A 0 to 1.5 A Filament 灯丝功率 700 W 700 W 700 W E-beam deflection 电子束偏转角度 220° 220° 220° Beam spot size 电子束斑点尺寸? .25 diameter .25 diameter .25 diameter X and Y sweep X/Y扫描 Hyper-Unimelt Sweep (0-200 Hz) Hyper-Unimelt sweep (0-200 Hz) Hyper-Unimelt sweep (0-200 Hz) Water / 冷却水 3.0 gpm, 50 psi, 3/8 tube 3.0 gpm, 50 psi, 3/8 tube 3.0 gpm, 50 psi, 3/8 tube Crucible material