MEMS GYROSCOPES.docxVIP

MEMS GYROSCOPES I. INTRODUCTION Mems（micro-electro-mechanical systems）gyroscope is a micro-scaled or millimeter-scaled inertial rate sensor. It has been applied to many aspects in our daily life. MEMS gyroscope to a portable device that can increase a lot of amazing features, including to improve the performance of the camera image stabilization function; Add more features and improve the usability of user interface; Exciting game entertainment functions. MEMS gyroscope will also be used in requirement of high sensitivity, low noise, low drift measurement deviation (due to the long time use o