半导d体行业对外测试设备介绍.docVIP

SSM 2000 SRP介绍 The spreading resistance technique is a method for measuring the electrical properties of semiconductor materials with very high spatial resolution; it is based on measurements of the contact resistance of specially prepared point contacts on doped silicon samples. The SSM 2000 NANOSRP? System is an automated spreading resistance probe designed to characterize the electrical properties of doped silicon materials. This system generates profiles of resistivity, carrier density, and electrically active dopant density more quickly and more easily than its predecessor, the SSM 150.