晶体生长计算软件FEMAGCUSP磁场对8英寸半导体级硅晶体生长的影响.ppt

晶体生长计算软件FEMAG 之 CUSP磁场对8英寸半导体级硅晶体生长的影响 Report Bruker ASC FEMAGSoft ? 2012 FEMAGSoft ? 2012 OBJECTIVE PROCESS CONDITION CZ furnace - 8 inch diameter crystal, 24 inch diameter crucible To predict the impact of a CUSP magnetic field operating at 140 A with the neutral-axis located on the melt free surface. SIMULATION PROCESS The growth process is modeled as Time dependent simulation taking in to account the transient effects taking place during the growth of the crystal PARAMETERS OBSERVED The concentration of the Oxygen in the melt and crystal. The concentration of the Phosphorous in the melt and crystal The concentration of the Carbon in the melt and crystal FEMAGSoft ? 2012 CRYSTAL RADIAL OXYGEN MEASUREMENT POSITIONS FEMAGSoft ? 2011 PREDICTION OF RADIAL OXYGEN CONCENTRATION FEMAGSoft ? 2012 PREDICTION OF RADIAL OXYGEN CONCENTRATION FEMAGSoft ? 2012 PREDICTION OF OXYGEN CONCENTRATION ALONG THE HEIGHT OF THE CRYSTAL FEMAGSoft ? 2012 PREDICTION OF CARBON CONCENTRATION ALONG THE HEIGHT OF THE CRYSTAL FEMAGSoft ? 2012 PREDICTION OF PHOSPHOROUS CONCENTRATION ALONG THE HEIGHT OF THE CRYSTAL FEMAGSoft ? 2012 CUSP vs NOCUSP - OXYGEN CONCENTRATION - CRYSTAL FEMAGSoft ? 2012 CUSP vs NOCUSP - CARBON CONCENTRATION - CRYSTAL FEMAGSoft ? 2012 CUSP vs NOCUSP - PHOSPHOROUS CONCENTRATION-CRYSTAL FEMAGSoft ? 2011 CUSP vs NO CUSP - PHOSPHORUS RESISTIVITY - CRYSTAL FEMAGSoft ? 2011 PREDICTION OF RADIAL PHOSPHORUS RESISTIVITY FEMAGSoft ? 2012 NOCUSP VS CUSP TEMPERATURE IN THE MELT Animation – Temperature-melt.avi FEMAGSoft ? 2012 NOCUSP vs CUSP – MELT TURBULENT VISCOSITY Animation – Turbulent viscosity-melt.avi FEMAGSoft ? 2012 NOCUSP vs CUSP-VELOCITY STREAM FUNCTION Animation - psi-melt.avi FEMAGSoft ? 2012 NOCUSP vs CUSP - OXYGEN IN THE MELT Animation - Oxygen-melt.avi FEMAGSoft ? 2012 NOCUSP vs CUSP - PHOSPHOROUS IN THE MELT - 1 Animation - Phosphorous-melt.avi FEMAGSoft ? 2012 NOCUSP vs CUSP- PHOSPHOROUS IN THE MELT - 2 Animation - Phosphorous-melt2.avi