基于PLC的单晶炉的自动化控制系统的设计..doc

基于PLC的单晶炉的自动化控制系统的设计Abstract During the growth of single-crystal furnace crystal, production process automation and seeding, shouldering, and other control path and ending the four stages of production furnace temperature feel the quality of this product, especially to control the temperature in the furnace single crystal silicon crystal formation process played a crucial role. In our case, most of the single-crystal silicon production enterprises furnace production process or whether it is the level of automation are lagging behind, furnace temperature control accuracy is not high direct impact on the quality of the products can only be in the low end, It can only be used in photovoltaic power generation, and can not enter the field of high-end chip. Firstly, the need for relevant research background, topics, current research and research purposes and to introduce the contents of this paper to do, then the basic theory system modeling referred to herein, parameter identification of linear and nonlinear mathematical model analysis for analysis through this system, the control scheme design and control and instrumentation selection, and other content leads, focusing analysis section of this paper describes the design and implementation based on model predictive control algorithm of single crystal furnace temperature to equal-stage model prediction controller design and simulation introduced as a starting point, then obtain single-crystal furnace temperature control by comparison between the MPC and PID control system should be based on the effect of the MPC controller is preferred, the final stage through the Equal analog controller in a single crystal other three important stages of the draw furnace, each stage should have a system in line with its own controller, and to the actual handover time between each stage of the model will be based on reasonable arrangements for the various stages of the production process; In this paper, linear systems modeling, parame