ppt课件-vacuumtechnologypartiiofthewhatexactlydowehave.pptVIP

Vacuum TechnologyPart II of the “What exactly do we have down there?” series What is a vacuum? Practical concerns limiting vacua How can we do better? How does one achieve vacuum? Pumping – Two types Transfer – relies on moving molecules from low to high pressure regions Trapping – makes use of chemistry to trap or bury gas particles Mechanical pump designs Diffusion Pumps Rely on jets of boiling fluid (usually silicone oil) to force air particles out of the region being evacuated. Cold traps prevent back streaming. Turbomolecular Pumps Similar in design to a jet engine. Alternating rotor