ICProcessing.pptVIP

Integrated Circuit Processing Pulling ingots Wafers Patterning Fabrication cycle Testing Packaging CAD design of ICs Future issues Pulling Ingots Monocrystalline silicon is produced from purified polycrystalline silicon by “pulling” an ingot polysilicon is melted using radio frequency induction heaters “seed crystal” of monocrystalline silicon is dipped into melt silicon grows around structure of seed as seed is slowly withdrawn Pulling Ingots (continued) Produces an ingot of pure silicon 400 mm - 1000 mm long (15” - 39”) 150 mm - 200 mm in diameter (6” - 8”) Growth is a slow process 10 - 20 h