Fluent－等离子体增强制造工艺的CFD模拟.ppt

Company Confidential Copyright 2001 Fluent Inc. All rights reserved. New Initiatives at Fluent Inc. Outline Introduction Applications What is a plasma? Modeling approaches Examples: Semiconductor manufact’g (FLUENT/PLASMATOR) Surface hardening (FLUENT) Plasma cutting torches (FLUENT) Summary Introduction (1) Plasmas are being more widely used in a variety of manufacturing processes... semiconductor fabrication: CVD, PVD, etching surface treatment, hardening plasma sprays, specialized coatings pollution control: waste removal also materials synthesis, welding, lighting, polymers, high-performance ceramics ...and products: flat panel displays high-intensity discharge lamps Introduction (2) Typical plasma processes include: implantation - particles accelerated through the plasma embed themselves beneath the surface of the material sputtering - plasma physically removes atoms from the surface etching - plasma particles bond to the surface atoms and produce a volatile compound plasma deposition (plasma particles chemically bond with the surface) and polymerization thermal plasma spraying Introduction (2) Why? What are the advantages of plasmas? Plasma can be accelerated and steered by electric and magnetic fields which allow it to be controlled and applied Accelerated ions bombard the surface with energies much greater than thermal energies -- thus lower processing temperatures may be achieved Directionality of ions provides anisotropic etching Plasmas may provide a more cost effective or a more environmentally benign alternative to other competing processes Plasmas can be used as a thermal heat source What is a Plasma? The fourth state of matter: solid, liquid, gas, plasma Plasma is a partially ionized gas: conductive assembly of charged particles, neutrals and fields carries electrical current and generates magnetic field most common form of matter, comprising more than 99% of the visible universe examples: the sun, fluorescent light, neon sign, plas