全球半导体晶体生长计算著名商业软件femag_numerical simulation of crystal growth for application.pptVIP

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全球半导体晶体生长计算著名商业软件femag_numerical simulation of crystal growth for application.ppt

FEMAGSoft ? 2013 No Marangoni convection With Marangoni convection Equivalent axisymmetric calculations 4. DS process simulation (cont’d) FEMAGSoft ? 2013 3D FEM-spectral calculations 3D effect of Marangoni convection 4. DS process simulation (cont’d) Sapphire growth simulation FEMAGSoft ? 2013 5. Sapphire growth FEMAGSoft ? 2013 Steel pulling axis Sapphire Iridium crucible Zirconium oxide Zirconium oxide granules Quartz Simulation of sapphire crystal growth by the Czochralski method Furnace model 5. Sapphire growth (cont’d) FEMAGSoft ? 2013 Melt meshes BLM (boundary layer mesh) Coarse mesh 5

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