3维激光振镜扫描系统的关键技术研究.pdfVIP

第33 卷第4 期 激光技术 VoI. 33 ,No.4 2(盼年8 月 LASER TECHNOLOGY August ， 2α 文章编号: 1∞1-3806(2刷)04-0377-04 3 维激光振镜扫描系统的关键技术研究 文世峰，史玉升\谢 军，蔡道生 (华中科技大学材料科学与工程学院材料成形与模具技术国家重点实验室，武汉 43∞74) 摘要:为了设计可用于大幅面扫描的3 维激光振镜扫描系统，深入研究了 3 维激光振镜扫描系统的动态响应性能 及控制算法、校正算法，采用具有高响应性能的伺服机构作为系统的执行机构，合理地规划扫描路径以及扫描延时参量， 设计了对扫描图形进行精确校正的扫描校正模型，开发出了一套能实现大幅面精确扫锚的3 维激光振镜扫描系统。该3 维激光振镜扫描系统经过长期实验验证，运行稳定，其扫描重复定位精度不大于30阳，扫描精度可达 1∞mm :t: O.lmmo 3 结果表明，该 维激光振镜扫描系统在需要进行大幅面精确激光扫描行业中有重要应用价值。 关键词:光学器件;振镜;动态聚焦 动态性能;扫描精度 E 中图分类号: TN249 文献标识码: A doi: 10. 3969/j. issn. 1∞1-3806.2∞9.04.012 Study on key technology for 3-D galvanometric scanners WEN Shi -feng ,SHI Yu-sheng ,XlE Jun , CAI Dω-sheng (State Key Laboratory of Material Processing and Die Mould Technology ,Material Science and Technology Institute ,Huazhong Univeni句Science and Technology ,Wuhan 43∞73 ， China) Abstract: In order to design a 3-D galvanometric scanner with a large working field ，阳 市1缸nic respon回 capability , control algorithm and calibration algorithm were studied in detail. Mter selecting a servo motor 时th high d严四nic response as 由e executive unit of the scanner , optimizing the scanning path and delay parameters ,a 3-D scanner Wiωdeveloped successfully. A precise calibration model w部 designedωcalibrate 也e scan image. This 钝t of sc皿ner Wωvalidated 川th it running for a long 也ne. 四e scanner worked stably 响曲 repeating 1ωation precision of =s:; 30μn and scanning precision of 1∞mm :t: 0. lmm. 四e results show 由at 由e 3-D scanner has important application in large scanning fields. Key words: optical de