基于柔性铰链支撑的动镜扫描系统.pdfVIP

Spectroscopy and Spectral Analysis Vo No pp A ug us t DSP TH A DOI j issn FT IR PID Fig 1 FTIR interferometer light path and dynamic control system cm FT IR DSP DSP L cm x mm BAF B e a l x e w hu edu cn e a l qsw u w hu edu cn lbzeng w hu edu cn xy 22 y l x l xy Ml EI cos sin M Fig 2 Right angle type flexible hinge support mechanism 21 lL EI l EI L Fig 3 Short arm hinge schematic diagram Fig 4 Parallel to the two schemes F dx dy dx dx L FL KR dy F Kp FL KR Kp KR L x y x x sin l cos l x FL KR FL KR y DSP DSP TI F DSP PID DA IC DSP Fig 5 Moving mirror control system Fig 7 The overall mechanical structure of the dynamic mirror system Fig 6 Angle mirror seat and the position of permanent magnets QBe gc a Table 1 The physical properties of beryllium bronze m J kg M Pa M Pa SO L IDW O RK S PAT RAN quad my mm y l mm L x mm mm m x Fig 8 Finite element model of flexible hinge support institutions l mm L mm mm Fig 9 Move speed sampling figure N xi x S i N S RSD DSP FT IR FT IR xmin x xmax DSP References T a suyuk T anahash M asaya T oda H de osh M yash a e al IEEE Xplore WD Sun X aoj e M ao J anhua Da Zuox ao e al Op cal Sys e T echnolog es or M anu ac ur ng and T es ng do WENG Sh u Four er T rans or In rared Spec roscopy A nalys s LIU Hua LIU We q FENG Ru e al In rared and Laser Eng neer ng Y A NG Xue eng LI We W A NG Yu q ao e al Nano T echnology and Prec s on Eng neer ng M lan M losev c In ernal Re lec on and A r Spec roscopy John W ley Sons V l kyl T Kaupp nen J Appl ed Op cs LIU R long YIN De ku In rared Bernhard B Soro k n E Jacque P e al A ppl ed Phys cs B do s Moving Mirror Scanning System Based on the Flexible Hinge Support XIE Fei FENG Fei WANG Fu bei WU Qiong shui ZENG Li bo School of Electronic Information Wuhan U niversity Wuhan China Abstract In order to improve moving mirror drive of Fourier transform infrared spectrometer w e design a dynamic scanning system based on flexible hinge support U sing the flexible hinge support w ay and the voice coil motor drive