应用硅和非硅MEMS技术的微型直接甲醇燃料电池.pdfVIP

第17卷第6期 2009年6月 光学精密工程 Optics and Precision Engineering V01．17 No．6 Jun．2009 文章编号1004—924X(2009)06—1218-05 应用硅和非硅MEMS技术的微型直接甲醇燃料电池 汤小川1，张宇峰1，苑振宇1，王喜莲1，刘晓为1’2 (1．哈尔滨工业大学MEMS中心，黑龙江哈尔滨150001； 2．哈尔滨工业大学微系统与微结构制造教育部重点实验室，黑龙江哈尔滨150001) 摘要：分别以硅和不锈钢材料为极板研制了两种结构简单、体积小、比能量密度高的微型直接甲醇燃料电池，并介绍了该 电池的工作原理和结构。利用光刻、溅射和腐蚀等MEMS技术完成了硅基微型直接甲醇燃料电池的制作，实验测试表 明，在室温条件下，使用1．5 mol／L甲醇溶液供液时其开路输出电压为520 mV，最大输出功率密度达到5．9 roW／eraz； 利用非硅微加工技术完成的不锈钢微型直接甲醇燃料电池，在室温下用2 mo|／L甲醇溶液供液时开路输出电压为650 mV，最大输出功率密度达到15．8 mW／cm2。 关 键词：甲醇燃料电池I硅基技术，非硅微加工；微机电系统；最大功率密度 中图分类号：TM911．4 文献标识码：A Micro direct methanol fuel cells based on silicon and non。。silicon MEMS technologies TANG Xiao—chuanl，ZHANG Yu—fen91，YUAN Zhen-yul， WANG Xi—lianl．LIU Xiao-weil-2 (1．MEMS Center，Harbin Institute of Technology，Harbin 1 5000 1，China； 2．Key Laboratory of Micro—systems and Micro—structures Manufacturing， Ministry of Education，Harbin Institute of Technology Harbin 150001，China) Abstract：Two kinds of micro Direct Methanol Fuel CelIs(wDMFC)characterized by simple configurations， small sizes and high specific power densities are presented by using silicon and stainless steel as poles in this paper．The working principle and structure of the wDMFC are introduced．Then，the silicon wDMFC is ac— complished using Micro Electro Mechanic System(MEMS)technologies such as lithography，depositing and etching．Experimental results show that the open circuit voltage is 520 mV and the peak power density can reach 5．9 mW／cm2 for the silicon旷DMFC at room temperature when the molar concentration of methanol solution is 1．5 tool／L．Moreover，the stainless steel wDMFC is fabricated using a non-silicon micromachining technology，and it can offer an open circuit voltage of 650 mV and a peak power density of 15．8 roW／era2眦一 der the 2 tool／L methanol solution at room temperature．It iS concluded that the performance of the stainless steel p—DMFC is greatly better than that of the silicon弘一DMFC． Received date：2009-0 1-20；Revised date；2009—04-30． Foundation item：Supported b