RFEndpointDetectorCalibration.docVIP

Endpoint Detector Calibration Use the following procedure to calibrate the endpoint detector. 1. Set up the shadow ring clean (every wafer clean). 2. Set up the periodic clean with a dummy wafer if you are using the full coverage heater. (This procedure should be done with the dummy wafer handling) 3. Make sure that the chamber is completely clean and free of tungsten residue. If necessary, do a complete wet clean of the chamber followed by a standard plasma clean recipe. 4. For a shadow ring chamber, run the Shadow Ring Endpoint recipe and without an AIN wafer on the heater. For a full coverage chamber, enter the Full Coverage Endpoint recipe. Set the periodic clean count to 24 on the Control System page. Run a particle check wafer into the WxZ in automatic mode. This will increase the wafer count to 25, which will trigger a periodic clean and load a dummy wafer into the WxZ chamber. 5. Adjust the gain control knob until you read 7.50 VDC on the AI/O screen. AI channels for the specific chamber. Detector Gain Calibration Troubleshooting Following figure is detector gain calibration troubleshooting. For reference.