超高真空离子束溅镀机.docVIP

NCKU Micro-Nano Technology Center/Southern Region MEMS Center Page PAGE 21 PAGE 本文件及文件之內容屬國科會南區微系統研究中心所有，謹供列印閱讀，未經許可，請勿以任何形式翻製抄襲。 This document is the property of the NSC Southern Region MEMS Research Center. You are very welcome to browse and print out the document. It is extremely illegal to copy any part of this document in any forms without permission! Document Type Title Document No. Edition Editor Date SOP Ion Beam Sputter 12345-678 1 蔡名琨 2003/ 超高真空離子束濺鍍機 Ultra-High Vacuum Ion Beam Sputter 撰寫者：蔡名琨 部份修改：彭政展 2009/05/23 目錄 前言………………………………..…………….3 原理…………………………………………...…3 系統分類…………………………