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Mechanical characterization of Ni–P-based ternary coatings by RF.pdf

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Mechanical characterization of Ni–P-based ternary coatings by RF

Thin Solid Films 441 (2003) 165–171 0040-6090/03/$ - see front matter 2003 Elsevier B.V. All rights reserved. doi:10.1016/S0040-6090(03)00970-2 Mechanical characterization of Ni–P-based ternary coatings by RF magnetron sputtering Fan-Bean Wu, Jenq-Gong Duh* Department of Materials Science and Engineering, National Tsing Hua University, Hsinchu, Taiwan, ROC Received 22 November 2002; received in revised form 30 April 2003; accepted 10 June 2003 Abstract The Ni–P-based ternary coating with a third element, including Cu, Cr and W, is fabricated by the RF magnetron sputtering. It is revealed that the PyNi ratio and the amount of the third element in the ternary coating can be controlled through power adjustment and target design during sputtering. All the ternary coatings exhibit an amorphous microstructure in the as-deposited state. Mechanical properties, including microhardness and scratch behavior are characterized and analyzed with respect to the concentration of the additional element as well as the thermal history in the following heat treatment. It is observed that the hardness of the coatings can be effectively modified with the composition control of the third elements. Possible embrittlement caused by the third elements through scratch test is also discussed. 2003 Elsevier B.V. All rights reserved. Keywords: Ni–P-based ternary coating; RF magnetron sputtering; Microhardness; Scratch 1. Introduction Electroless nickel–phosphorous (EN) has been proved to be an excellent protective coating and is widely used in versatile applications due to its mechan- ical and chemical properties, including uniform thick- ness, high hardness, wear and corrosion resistance w1– 4x. The as-deposited electroless Ni–P deposit exhibits a microstructure of amorphous Ni matrix supersaturated with P, and can be strengthened by the precipitation of nickel-phosphide crystallites, i.e. Ni P compounds suchx y as Ni P, Ni P and Ni P w5–7x, under heat treatment. 3 5 2 12 5 However, with ex