常见金属的腐蚀液配方.docVIP

Material to be Etched Chemicals Ratio Comments Aluminum (Al) H3PO4 : Water : Acetic Acid : HNO3 16:2:1:1 PAN Etch; 200 nm/min @ 25 C; 600 nm/min @ 40 C Aluminum (Al) NaOH : Water 1:1 may be used at 25 C but etches faster at a higher temperature Aluminum (Al) H3PO4 --- must be heated to 120 C Chromium (Cr) HCl : Water 3:1 --- Chromium (Cr) HCl:Glycerin 1:1 --- Copper (Cu) HNO3 : Water 5:1 --- Copper (Cu) Ammonium Persulphate --- --- Gold (Au) KI : I : Water 115 g : 65 g : 100 ml --- Gold (Au) HCl : HNO3 3:1 Aqua Regia; discard after use Iron (Fe) HCl : Water 1:1 --- Iron (Fe) HNO3 :