硅基纳米结构的减反特性及其在太阳能电池中的应用.pdfVIP

Vol. 32, No. 8 Journal of Semiconductors August 2011 Antireflection properties and solar cell application of silicon nanoscructures Yue Huihui(岳会会), Jia Rui(贾锐)?, Chen Chen(陈晨), Ding Wuchang(丁武昌), Wu Deqi(武德起), and Liu Xinyu(刘新宇) Key Laboratory of Microwave Devices and Integrated Circuits, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China Abstract: Silicon nanowire arrays (SiNWAs) are fabricated on polished pyramids of textured Si using an