大尺寸平板玻璃磁控溅射室与真空系统设计.pdfVIP

大尺寸平板玻璃磁控溅射室与真空系统设计 摘 要：大尺寸平板玻璃镀膜技术主要应用于建筑玻璃、平板显示等领域。目 前，生产大尺寸玻璃广泛采用真空磁 溅射镀膜工艺，每年都有大量的平 板玻璃进行溅射镀膜。我国连续式磁 溅射镀膜设备多为进口,国内自主 研发设计还有很大的空缺。因此本设计具有十分重要的意义。本文介绍了 磁 溅射镀膜的工艺流程和大尺寸玻璃生产线的组成。设计出了一种用于 大尺寸平板玻璃镀膜的磁 溅射室和真空系统。本文对真空腔体和机架进 行可行性设计，然后传动系统采用带传动进行玻璃的输送，抽气系统选用 分子泵作为主泵，溅射靶使用最新的中频 源供 的矩形平面孪生磁 溅 射技术。 关键词：大尺寸玻璃镀膜；磁 溅射；矩形平面靶；镀膜玻璃生产线 0 The design of magnetron sputtering chamber and vacuum system for large area glass coating Abstract: Large area glass coating mainly used in the field of architectural glass and flat panel display. Nowadays, magnetron sputtering coating film is the mainstream technology of vacuum coating , every year a large number of flat glass for coating. Thus, this design has very important practical significance. This article introduces the process line of the plane magnetron sputtering coated glass and the main craft processes of magnetron sputtering coating film. Then a feasibility of design proposal on the magnetron sputtering chamber and vacuum system is carried out. Feasibility design of vacuum system and rack are presented in the paper. Then drivetrain system uses the belt conveyor to drive，vacuum pumping system chooses the molecular pump as the main pump, and sputtering target uses the latest intermediate frequency power supply rectangular planar twin-target sputtering technology. Keywords:large area glass coating ；magnetron sputtering ；rectangular planar target ；coating glass product line 1 1 绪论 1.1 大尺寸平板玻璃镀膜设备的发展 目前，用于生产大尺寸玻璃的方法很多，主要有真空磁 溅射法、真空蒸发法、 凝胶浸渍法和 浮法镀膜等。从镀膜玻璃的膜层均匀性、牢固度、膜厚可控性以及产 品品种、生产操作的难易程度