3D加速度传感器PDF.pdfVIP

PART NUMBER: ± 2g Tri-axis Digital Accelerometer KXTE9-2050 Specifications Rev. 3 Nov-2009 Product Description The KXTE9-2050 is a Tri-axis, silicon micromachined accelerometer with a full-scale output range of +/-2g (19.6 m/s/s). The KXTE9 contains integrated orientation and activity detecting algorithms. The sense element is fabricated using Kionix’s proprietary plasma micromachining process technology. Acceleration sensing is based on the principle of a differential capacitance arising from acceleration-induced motion of the sense element, which further utilizes common mode cancellation to decrease errors from process variation, temperature, and environmental stress. The sense element is hermetically sealed at the wafer level by bonding a second silicon lid wafer to the device using a glass frit. A separate ASIC device packaged with the sense element provides signal conditioning, digital communication, and embedded logic for orientation and activity detection. The accelerometer is delivered in a 3 x 3 x 0.9 mm LGA plastic 2 package operating from a 1.8 – 3.6V DC supply. An I C interface is used for communication with the chip to configu