iCAP6000系列维修讲训.ppt

2008-4-24 ICP的结构组成 仪器用电脑的设置 电脑网卡及通讯地址设置 为便于识别，可将用于连接仪器的网卡更名为“iCAP”或“Instrument” 右键点该击本地连接/属性，选择TCP/IP，更改IP地址：90.0.0.1，网关子网掩码：255.255.255.0 更改C:\WINDOWS\system32\drivers\etc\hosts文件，在最后一行增加90.0.0.50 (7个空格)ICPOES_PCB，并保存hosts文件 电脑防火墙设置应该允许作为仪器通讯的本地连接的访问或关闭防火墙。 iTEVA软件安装 安装iTEVA软件前，不要开启仪器。 按照iTEVA软件提示逐步进行安装，软件安装结束后，在仪器关闭的情况下，点击运行iTEVA软件，先建立数据库连接 开启仪器，观察仪器联机情况。第一次联机可能时间要稍长一些联机后按提示做Download。仪器与电脑已有连接，即可听到仪器自检的声音，声音较大，如声音很小或断断续续，可能是前光路M2的步进电机与M2齿轮咬合有问题，可以先不处理。如在以后点火时出现 E2003 ：Plasma ignition failed, RF reported bad argon flow interlock failure.错误提示，仪器不能点火。在 Manufacturing and Service/Test ant Alignment/Setup, 运行Rattle Mechanisms, 出现E2069 Failed to find M2 view motor endstop, fore-optics motor position. 说明是M2问题，只需关闭仪器，将M2齿轮调节到光耦位置，重新开机即可。 iCAP的LED显示 iCAP的气路 iCAP的Standard Gas Box iCAP的操作及检查步骤 ICP的点火步骤 ICP的点火问题 iCAP的RF测试 ICP的分析步骤 ICP的结构组成 ICP的结构组成 ICP的结构组成 * The world leader in serving science iCAP6000系列维修培训 Note: the power supply LEDs only show that there is a supply, not that it is OK and within tolerance.?If they are glowing dimly it probably means the power supply has a problem! Check voltages using a digital volt meter ? Note also,?some solenoid valves are initially turned?on with the 24 volt supply and then held on with the 12 volt supply. the boost purge switch is depressed LED 9 ON PIC watchdog (blinks on/off once a second when PIC is running correctly) LED 8 ON + 12 volt supply is on (used to hold solenoid valves in on state) (not camera shutter) LED 7 ON - 15 volt supply is on (camera and I/O pcb analogue supply, also required by both RS232 channels LED 6 ON + 15 volt supply is on (camera and I/O pcb analogue supply, also required by both RS232 channels) LED 5 ON + 24 volt supply is on (solenoids, MFC’s, camera shutter) LED 4 ON + 5 volt supply is on (camera and I/O board logic) LED 3 ON TE Peltier supply on LED 2 ON RF processor has booted up properly LED 1 ON 电磁阀 Aux gas 2 Engineer gas Purge boost Aux gas 1 Purge normal Coolant gas 1 Coolant gas 2 Nebu