Synthesis and Characterization of Carbon Nitride Films for Micro Humidity Sensors 英文参考文献.docVIP

Sensors 2008, 8, 1508-1518 sensors ISSN 1424-8220 ? 2008 by MDPI /sensors Full Research Paper Synthesis and Characterization of Carbon Nitride Films for Micro Humidity Sensors Sung Pil Lee Department of Electronic Engineering, Kyungnam University, Masan, Kyungnam 631-701, Korea Tel. 82-55-249-2642, Fax 82-55-249-2838; E-mail: sensors@kyungnam.ac.kr Received: 23 January 2008 / Accepted: 26 February 2008 / Published: 3 March 2008 Abstract: Nano-structured carbon nitride (CNx) films were synthesized by a reactive RF magnetron sputtering system with a DC bias under various deposition condi