内箝位外驱动型压电精密步进旋转驱动电机研究.PDF

27 卷 15 期 中 国 电 机 工 程 学 报 Vol.27 No.15 May2007 2007 年5 月 Proceedings of the CSEE 2007 Chin.Soc.for Elec.Eng. 文章编号：0258-8013 (2007) 15-0100-06 中图分类号：TM384 文献标识码：A 学科分类号：47040 内箝位/外驱动型压电精密步进旋转驱动电机研究 刘建芳，杨志刚，曾 平，范尊强 (吉林大学链传动研究所，吉林省，长春市 130025) Study on Precision Piezoelectric Rotary Step Motor With Inner Clamp and Outer Drive LIU Jian-fang, YANG Zhi-gang, Zeng Ping, Fan Zunqiang (Chain Transmission laboratory, Jilin University, Changchun 130025, Jilin Province, China) ABSTRACT: A new precision rotary PZT actuator was 0 引言 proposed to improve its drive capabilities. The actuator is based 近年来，随着微/纳米技术的迅猛发展，对驱动 on the piezoelectric (PZT) technology. The actuator adopts the 精度的要求在纳米级的水平。在光学工程、微电子 principle of bionics and works with a new method of stator 制造、航空航天、超精密机械制造、微机器人操作、 inner clamp /rotor outer drive and a distortion structure of thin shelf flexible hinge. This structure improved stability of its 地震测量、生物、医学及遗传工程等技术领域的研 clamp and step rotary. Its characteristic was analyzed from the 究都迫切需要亚微米级、微/纳米级的超精密驱动， finite element analyses. The experiment shows that the new 因此，各种微特电机得到了快速的发展。其中由于 rotary PZT actuator worked with high frequency (40Hz), high 压电精密驱动电机具有高的驱动特性，在国内外得 speed (325μrad/s), large travel (360°), high 到了较为广泛的研究[1-6] 。 resolution(1μrad/step) and high torque (30N·cm). The actuator 压电材料在驱动时具有纳米级的稳定输出位 will be applied for large travel and high resolution driving 移精度，并且压电驱动线性好、控制方便、分辨率 device, op