基于混合优化算法测定铝薄膜光学常数_金伟华.pdfVIP

16 　9 　 Vol.16　No.9 2008 9 　 　 　　　　　　　　　Optics and Precision Engineering 　　　　　　　　 　 Sep.2008 　1004-924X(2008)09-1 82-07 1, 2 1 1 1, 2 1, 2 金伟华 ,金春水 , 张立超 ,朱宏力 ,刘　磊 (1.中国科学院长春光学精密机械与物理研究所 应 光学国家重点实验室, 吉林 长春 130033; 2.中国科学院研究生院, 北京100083) :。, , 。, , , (200 ～800 nm) ;, , , 2%。, , 26 nm 1%。 　　:铝薄膜;光学常数;椭偏光谱;遗传算法;单纯形法 :O484.　　:A Determination of optical constants for aluminum thin film based on combined optimal algorism 1,2 1 1 1,2 1,2 JIN Wei-hua ,JIN Chun-shui ,ZHANG Li-Chao ,ZHU Hong-li , LIU Lei (1.State K ey Laboratory of App lied Op tics,Changchun Insitute of Op tics,Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China; 2.Graduate Uni ersity of Chinese Academy of S ciences,Beij ing 100039,China) Abstract:An ex-situ determining method w as proposed for the optical constants of aluminum thin films precisely .Compared to the traditional in-situ method, the method had no need of the complex optical measurement apparatus attached to vacuum chamber and could do measurement simply and fastly .By using multi-w avelength fitting method, the ellipsometric and photometric spectra w ere fittd with a combination of optimal genetic algorism and a simplex algorism and the oxide layer formed on the aluminum in air w as considered in the fitting process.With the combination of parallel genetic al- gorithm and least square method, the fitting speed and quality were obviously improved and the opti- cal constants from the UV to visible range w ere obtained within an error no more than 2%.With these data know n, an UV induced transmission filter w ith one cavity w as designed.The tested trans- mission spectra are w ell co