基于SECS标准的半导体封装设备串口通信实现.pdfVIP

非|业战句件iL 基于SECS 标准的半导体封装设备串口边信实现 王峨1，.3:.具2. 带瑞东3 (1. 杭州4华立电网科技有限公筒，航州 310012; 2. 杭芝机电有限公筒，桃州剖0012; 3. 金华毒草盘技术学畴，嬉患工程学院，金华 321007) 擒，寄: SECS标准陆架纳…茜个生产设简定陶以及生产设简相控制设备辽阔的通讯。介绍了SECS栋 准的啕睛，摄制了使用SECS标准幢口解决半导体日韩设借涌锚的问棚，使所喃设备:î:副部遇 划船用S眨CS 柑准接口连接到由制器及暨离组2月U95J M巨S 相工广计划倍思果挠。假设骨能 快速地整台在CIM的啻理系统中。燕统实现了基于SECS标准的EßO耀健，并给出了墨子SECS 梅号~95J$O通璋的实镜。 共髓询: ~位辛苦体到主要设瑞:主征辛苦惊设备i揭(商标准; $Oi撞儒z 自却也 中团分提号: TP391 立献标识码:8 立意编号: 1009-0134( 2008)10-0083-04 Semiconductor packaging equipment serial communication based on SECS 2 3 WANG Jj1, WANG Bing , LI Rui-dong (1. Hangzhou Holley Power G时d Technology Co. , Ltd. , Hangzhou, 310012 , China; 2. Hangzhi Machinery 8 Electronics Co.U仗. Hangzhou, 310012 , China; 3. Jinhua ∞IIege of profession technology , Jinhua , 32丁 007， China) Abstract: SECS standard was developed to standlize the ∞mmunication between equipment and ∞ntroller. This paper íntroduces the structure of SECS standard. Presenting a solution based on SECS standard interface, and the issues of the semiconductor packaging equipment communiωtion was solved. AII equipments are linked to 佣11 ∞ntroller , MES and factory planning information system by SECS standard inte巾盹 Equipmentωn be inte- grated into CIM system rapidly. System implements the serial communicatîon based on SECS standard. Providing the example of serial ∞mmunicatÎon programming based on SECS protocol. Key words: semiconductor packaging equipment; S巨CS; serial communication; automation Int巳mational)制定了半导