半导体专业名词解释.doc

半导体专业名词解释 ===A=== A/D analog to digital AA atomic absorption AAS atomic absorption spectroscopy ABC activity-based costing ABM activity-based management AC alternating current; activated carbon ACF anisotropic conductive film ACI after-clean inspection ACP anisotropic conductive paste ACT alternative control techniques; actual cycle time ADC analog-to-digital converter ADE advanced development environment ADI after-develop inspection ADT applied diagnostic technique ADTSEM Apply/Develop Track Specific Equipment Model AE atomic emission; acousticemission; absolute ellipsometry AEC advanced equipment controller AECS Advanced Equipment ControlSystem; Automated Equipment Control System AEI after-etch inspection; automated equipment interface AEM analytical electron microscopy AES Auger emission/electron spectroscopy AFM atomic force microscopy AFP abrasive-free polish A-GEMTF Advanced GEM Task Force AGV automated guided vehicle AHF anhydrous hydrogen fluoride AHU air handling unit AIR automated image retrieval Al aluminum ALD atomic layer deposition ALE atomic layer epitaxy; application logic element ALS advanced light source; advanced low-power Schottky AMC airborne molecular contamination AMHS automated material handling system AMT advanced manufacturing technology AMU atomic mass unit ANN artificial neural network ANOVA analysis of variance AOV air-operated valve AP adhesion promoter APA advanced performance algorithm APC advanced process control APCD add-on pollution control device APCFI Advanced Process Control Framework Initiative APCVD atmospheric pressure chemical vapor deposition APEC advanced process equipment control API application programming interface; atmospheric pressure ionization APM atmospheric passivation module; acoustic plate mode APRDL Advanced Products Research and Development Laboratory aPSM attenuating phase-shift mask AQI ACCESS query interface AQL acceptable quality level Ar argon AR aspect