TEM和SEM的异同比较分析以及环境扫描电镜,场发射电镜与传统电镜相比较的技术特点和应用.(国外英文资料).doc

TEM和SEM的异同比较分析以及环境扫描电镜,场发射电镜与传统电镜相比较的技术特点和应用.(国外英文资料) XRD is the X ray diffraction analysis phase, SEM scanning electron microscope, mainly to observe microstructure, TEM is mainly observed by transmission electron microscope, micro structure gauge. AES refers to the energy spectrum, mainly analyze the concentration distribution. STM is a scanning tunneling microscope, ultrastructural observation. AFM is the atomic force microscope is used to observe the surface morphology. TEM: Transmission electron microscope (English: Transmission electron microscope, abbreviation TEM), TEM, the electron beam is projected to accelerate and aggregation of very thin samples, atomic collisions of electrons with samples in the direction of change, resulting in solid angle scattering. Relative density, thickness and size of the scattering angle of the sample, it can form different images. Usually, transmission electron microscopes resolution is 0.1 ~ 0.2nm, magnification to tens of thousands of millions of times, to observe the ultrastructural structure that is less than 0.2 m, optical microscope can not see, also called submicrostructure. TEM is a German scientist Ruskahe Knoll invented in 1932 and based on the previous Garbor and Busch. The imaging principle of the imaging principle of transmission electron microscopy can be divided into three kinds: Like: when electron beam quality, high density of samples, the main phase is the scattering effect. The sample thickness on the quality of the scattering angle of the electron, electronic less through, like the dark. Transmission electron microscopy early is the principle based on TEM transmission electron microscope . Diffraction image: electron beam diffracted by the sample, the sample diffraction wave amplitude distribution at different positions corresponding to the sample in different parts of the crystal diffraction ability when crystal defects, defect and complete diffraction ability of different regions, so that the amplitude di