原子力显微镜的基本原理与其方法学研究.pdf

原子力显微镜的基本原理及其方法学研究∗ 朱 杰 孙润广 陕西师范大学物理学与信息技术学院 生物物理研究室 西安 710062 摘 要：简述了原子力显微镜探测物体表面形貌的基本原理，具体地介绍了原子力显微镜的四大核心 构件的属性与功能：激光器、微悬臂、压电扫描器、光电检测器管；详细地阐述了该仪器探测运行的 三种模式：接触模式、非接触模式、轻敲模式，并重点讲述了轻敲模式的独到之处；强调了原子力显 微镜所能进行的参数分析和数据处理功能，同时将原子力显微镜同其它表面探测仪进行了比较，突出 了AFM 的优越性；并结合仪器的构造和工作原理，对仪器的改进和发展提出了一些建设性意见。 关键词：原子力显微镜；微悬臂；压电扫描器；光电检测器；运行模式； 中图分类号：Q61 文献标识码：A Introduction to Atomic Force Microscope and its Manipulation ZhuJie SunRunguang Biophysics Lab, College of Physics and Information Technology, Shaanxi Normal University, Xi’an 710062 Abstract: Introduced the basic principles of atomic force microscope (AFM) in detecting the surface shape of samples shortly, and reviewed the properties and functions of the four key components of AFM such as Laser, cantilevers, piezoelectric scanner and photoelectric diode concretely. Expatiated three kinds of running modes of this equipment such as contact mode, non-contact mode and tapping mode in details, and given prominence to the superiority of AFM according to the comparison and analysis between AFM and other surface detectors, and Stressed on the idiographic function of the instrument’s parameter-analysis and data-processing. And the paper ended with the author ’s personal constructive suggestions to the improvement and development of this equipment by combining its constitutions and work principle. Keywords: Atomic force microscope; Cantilever; Piezoelectric scanner; Photoelectric diode; Work modes 光学显微镜、电子显微镜、扫描隧道显微镜为代表的一系列先进显微技术的出现与应用, 为人类科技和社会进步做出了巨大贡献。1986 年，IBM公司的G.Binning 和斯坦福大学的 C.F.Quate及C.Gerber合作发明的原子力显微镜(Atomic Force Microscope, AFM)[1]更是突出 地显现了显微观测技术作为人类视觉感官功能的延伸与增强的重要性，它是在扫描隧道显微 镜基础上为观