铝电解电容器用高介电常数复合氧化膜的制备-材料工程.PDF

56 材料工程 / 2 6 年2 期 Preparation of High Dielectric Constant Composit e Oxide Films for Aluminum Electrolytic Capacitors 陈金菊, 冯哲圣, 郭洪蕾, 杨邦朝 ( 电子科技大学微电子与固体电子学院, 成都61 54) CH EN Jin-ju, FENG Zhe-sheng, GU O Hong-lei, YANG Bang-chao ( School of M icro-electronics and Solid Electronics, University of Electronics Science and Technology of China, Chengdu 61 54, China) : 用水解沉积- 阳 氧化法制备高介电常数的Al-Ti 复合氧化膜, 通过 XPS 分析 A-l Ti 复合氧化膜的成分及各元 素的相对含量。监测铝电 箔恒电流阳 氧化过程中的升压曲线, 对复合氧化膜的介电常数进行理论计算, 并测试铝 电解电容器的容量及耐久性。结果表明: 铝电 箔在含钛无机盐溶液中的最佳处理时间为1 min, 处理后的铝电 箔阳 氧化速率高于纯铝电 箔, A-l Ti 复合氧化膜中的高介电常数相为TiO 。对 16V/ 1 LF 规格的铝电解电容器, 形成 2 Al-Ti 复合氧化膜的样品, 容量提高率为23%, 且耐久性良好, 复合氧化膜介电常数的理论计算值与实验结果较为一致。 : 铝电 箔; 水解沉积; 阳 氧化; 高介电常数; A-l Ti 复合氧化膜 : T B33 : A : 1 1-4381(2 6) 2- 56- 5 4+ Abstract : Aluminum foils w ere dipped in solution containing T i and heated in air at 5 e to depos- it T i oxide on the inner w alls of pores, and then anodized galvanostatically in ammonium adipate so- lution, by w hich A-l T i composite oxide films were achieved. Film composition and percentage of at- om w ere analyzed by XPS, voltage-time response of aluminum foil during anodizing w as follow ed, dielectric constant of composite films w as calculated in theory, and capacitance and durability of alu- minum electrolytic capacitors w as examined. The results show that impregnating time is optimally 1 min, and compared w ith pure aluminum foil