戎右重傩.PDF

Prediction of particulate characteristics in an expanding laser plume Dustin Blair a , Mark Tillack a and Mofreh Zaghloul a a University of California at San Diego, Energy Technology Group  ABSTRACT We present a mathematical mo del of particulate formation and dynamics in the laser ablation plume. This mo del is presented in a practical layout and applied to an example problem predicting the b ehavior of silicon, a material commonly used in the fabrication of micro devices. Additionally, we examine an intermediate intensity regime of laser ablation, in which there are multiple co oling mechanisms that can b e considered imp ortant, but plume ionization is not signicant. Results are discussed with an emphasis on pulsed laser ablation manufacturing pro cesses, which often take place at atmospheric pressure. Imp ortant observations derived from this work are as follows: 1) The plume is quickly condensed and stopp ed in less than a microsecond in a distance of less than a  millimeter at atmospheric pressure. 2) Particulates predicted by this mo del are on the order of 10 A in diameter, the ma jority of which condense back onto the target surface. Keywords: C ondensation, Plume, Laser, Ablation 1. INTRODUCTION The particles condensed out of laser ablation plume vap or along with those released via hydro dynamic sputtering create problems in the pro duction of micro devices utilizing laser machining te