磁控溅镀机.pdfVIP

NCKU Micro-Nano Technology Center/Southern Region MEMS Center 磁 控 濺 鍍 機 (Magnetron Sputter) S O P 本文件及文件之內容屬國科會南區微系統研究中心所有，謹供列印閱讀，未經許可，請勿以任何形式翻製抄襲。 This document is the property of the NSC Southern Region MEMS Research Center. You are very welcome to browse and print out the document. It is extremely illegal to copy any part of this document in any forms without permission! Doc