纳米厚度薄膜外差椭偏测量技术的研究 - 深圳大学.pdf

3 13 V ol. 31 No. 3 2 0 0 5 5 OP T ICA L T E CHN IQ U E M ay 2005 : 100215 82 ( 2005) 030 39 10 3 纳米厚度薄膜外差椭偏测量技术的研究 1, 2 1 2 2 1 邓元龙 , 姚建铨 , 阮双琛 , 孙秀泉, 王鹏 ( 1. , 30007 2 2. , 518060) : , 20kHz , 0. 1, , , , : : TH744 . 3 : A Study of heterodyne ellipsometry for nanometer film measurement 1, 2 1 2 2 1 DENG Yuanlong , YAO Jianquan , RUAN Shuanchen , SUN Xiu_quan , WANG Peng ( 1. Institute of Laser Optoelectronics Engineering, College of Precision Instrum ent , T ianjin U niv. , T ianjin 30007 2, China) ( 2. School of Engineering T echnology, Shenzhen U niversity, Shenzhen 5 18060, China) Abstract: Combining optical heterodyne interf ero metry w ith transm itted ellip som etry, a new precision method w ith hig h sp eed w as applied to the m easurem ent of nanom eter f ilm . T he r elation ships betw een accur acy of ellip som etric param eters and m easurem ent result s w ere discu ssed in term s of num er ic analysis of coefficient of complex sensitivit y. T w o acou stooptic modula tors w ere used to generate 20kHz beat frequency, so the r esolution of ph ase m easur em ent r eached 0 . 1by simply directph ase co mp arison m ethod , and no w ave plates and mov ing m ech anism app eared in the system . W ith autom ation process and high anti inter ference p erf orm ance, this method is applicable to cont inuou s m easurem ents on t he indu strial spo t . T he possibility up to sub nanom eter accuracy w as demonstrated by the ex perim ental resul