三维原子探针(3DAPT)分析技术简介 - 国家奈米元件实验室.PDF

1 02 (3DAPT ) Introduction of analytical technology of 3DAPT - (FinFET) Abstract The capability of existing advanced metrology tools is not able to provide both of structural and elemental information at the same time. However, in many areas of research in material science, there is an overwhelming demand for advanced metrology, especially in semiconductor research of FinFET structures. It is therefore, of extreme interest to develop a method that provides data with resolution at atomic level for detailed characterization. This article will introduce a 3D Atom Probe Tomography method to overcome current analytical limitations in the eld. Keywords FinFET , 3D Atom Probe Tomography (3DAPT) NANO COMMUNICATION 21 No. 4 03 (Field ion microscopy (FIM)) ( 3 D - A P o r A P T : A t o m P r o b e FIM Tomography) .(Time of Fly Mass Spectroscopy) 3D [1] (Electrical Polishing) 3 3D [2] (50nm)(10- 11mbar) 20-100 K