高斯光束均束器光学系统设计 design of gaussian beam homogenizer optical system.pdfVIP

第40 卷第 7 期 光电工程 Vol.40, No.7 2013 年 7 月 Opto-Electronic Engineering July, 2013 文章编号：1003-501X(2013)07-0034-05 高斯光束均束器光学系统设计 李玉瑶，王 菲，车 英 ( 长春理工大学 光电工程学院，长春 130022 ) 摘要：为了提高激光光束的应用水平，需要将高斯光束整形为平顶光束。分析了非球面高斯光束均束器的基本原 理和设计理论，选用超高斯光束函数作为平顶光束的数学-物理模型，建立了入射高斯光束与出射平顶光束之间的 映射关系式，给出了高阶非球面的面型参数，利用光学设计软件 ZEMAX 设计了高斯光束均束器光学系统。系统 入射光束直径为 2 mm ，出射光束直径为4 mm ，激光波长为 1 064 nm。分析了能量转换效率，根据Bessel 公式定 义了平顶光束的平顶度。设计结果实现了激光束的 2 倍准直扩束、95.98%的能量转换效率和 96.6%的平顶度。 关键词：光学设计；高斯光束；均束器；ZEMAX；非球面 中图分类号：O439 文献标志码：A doi：10.3969/j.issn.1003-501X.2013.07.006 Design of Gaussian Beam Homogenizer Optical System LI Yuyao ，WANG Fei ，CHE Ying ( School of Optoelectronic Engineering, Changchun University of Science and Technology, Changchun 130022, China ) Abstract : In order to improve the application level of laser technology, it is necessary to convert a Gaussian beam to a flattop beam. The basic principles and design theory of aspheric Gaussian beam homogenizer was analyzed, and the function of super Gaussian beam was chosen as the mathematical and physical model of flattop beam. The mapping formula of the incident Gaussian beam and the output flattop beam w established. Then, the surface coefficient of high order even aspheric was given. Moreover, the optical system of Gaussian beam homogenizer was designed with optical design software ZEMAX. The incident beam diameter was 2 mm, the output beam diameter was 4 mm and the wavelength of the laser was 1 064 nm. The energy conversion efficiency was analyzed, and the flattened deg