微小激光加工区辐射测温准确性的提高 improvement on the radiometric temperature measurement in small laser-processing region.pdfVIP

33 1 Vol.33, N0.1 2006 1 Opto-Electronic Engineering Jan, 2006 文章编号 1003501X(2006 微小激光加工区辐射测温准确性的提高 (电子科技大学 光电信息学院 四川 成都 610054) 摘要 —Lucy-Richardson 4 21µm Lucy-Richardson 100 关键词 Lucy-Richardson 中图分类号 TN305 文献标识码 A Improvement on the radiometric temperature measurement in small laser-processing region ZHAO Ai-ying YE Yu-tang WU Yun-feng WANG Yu-lin ZHANG Xue-qin FAN Chao JIAO Shi-long (School of Opto-electronic Information University of Electronic Science and Technology of China Chengdu 610054, China) Abstract During temperature measurement with radiometric pyrometer, many factors will make the distribution of experimentally measured temperature lower than practical temperature. A new method to estate practical temperature is proposed in the paper. This method is based on the modification of changing the original detector into a single mode SM fiber pigtailed detector to reduce receiving surface , changing the original lens into an infrared an-aberration lens and finally derives the practical temperature with the help of Lucy-Richardson algorithm usually used for image reconstruction. The first four procedures