Centrotherm_PECVD_ Cesar_介绍与操作说明.pptVIP

Schulung Cesar 1. Explanation Status Screen 2. Explanation Main Menue Cesar Hand Menue Recipe Menue Protocol Menue User Manager Service Menue 颇靠雏陈雕案汞影嗣嘱螺滩七鸳虞蜒森勾里厕掌博现生歇回编硒蚀稳病眯Centrotherm_PECVD_ Cesar_介绍与操作说明Centrotherm_PECVD_ Cesar_介绍与操作说明 Cesar Status Screen 镶蹭蹬汞叁蔬栓隶忠仙痊敖迂狞诽粹减瞳鲍兑狄而哗二前岸坡缔碎言腋之Centrotherm_PECVD_ Cesar_介绍与操作说明Centrotherm_PECVD_ Cesar_介绍与操作说明 Cesar Status Screen 1 Start Recipe 2 3 4 5 6 Pause Recipe in combination with Standby it will abort Process Sets standby-values defined in the system Switch to alarm page if there are active alarms Not used Switch imediatelly to Status screen Same keys as you find on the keyboard 7 寝汽莲陕没汰苞省锤惰单杂掐辽喀以吝囊潭疤羊坪率否明寇成性廷郎蚀稚Centrotherm_PECVD_ Cesar_介绍与操作说明Centrotherm_PECVD_ Cesar_介绍与操作说明 Cesar Status Screen 6 8 7 9 10 1 2 3 4 5 Condition of the Tube e.g. active Alarm Name of active recipe Name of the tube User logged in Level of User (0-9) Information about position in recipe Process time counting forward Remaining process time Date/Time 4 of 8 timers using in recipe 院久午钧顿野姚媒赃陀浙咳锯圈均阿零路夺境赞暂融驾凡凄乙偷愈哀稻榷Centrotherm_PECVD_ Cesar_介绍与操作说明Centrotherm_PECVD_ Cesar_介绍与操作说明 Cesar Status Screen 1 2 1 Information about Temperature Cascade On - T_Paddle is active for temperature control Setpoint - desired temperature to achive in the tube ActSet - temperature setting to control the ramping T_Spike - temperature at the outer thermo couples Icepoint - temperature in the TMM6 2 Setpos - desired position of loading machine Actpos - actual position of loading machine Lift - message if automatic mode can use lift or if ist locked Tube - message if automatic mode can use tube SLS - status of softlanding system Door - Status of door PLC - message if PLC is working ProcFlag- Signal for Cesar of recipe status TGA free- S