design and fabrication of a novel t-shaped piezoelectric zno cantilever sensor设计和制造的新型氧化锌丁字形的压电悬臂梁传感器.pdfVIP

Hindawi Publishing Corporation Active and Passive Electronic Components Volume 2012, Article ID 834961, 7 pages doi:10.1155/2012/834961 Research Article Design and Fabrication of a Novel T-Shaped Piezoelectric ZnO Cantilever Sensor Kai Yang, Zhigang Li, and Dapeng Chen Institute of Microelectronics, Chinese Academy of Sciences (IMECAS), Beijing 100029, China Correspondence should be addressed to Kai Yang, kai.yang@ Received 5 March 2012; Revised 12 May 2012; Accepted 15 May 2012 Academic Editor: Ching Liang Dai Copy