Your Guide to SEMI Specifications for Si Wafers（你的向导为硅晶片半规范）.pdf

Your Guide to SEMI Specifications for Si Wafers June 2002 Virginia Semiconductor 1501 Powhatan Street, Fredericksburg, VA 22401-4647 USA Phone: (540) 373-2900, FAX (540) 371-0371 , tech@ A. Introduction The full set of SEMI Specifications for Si Substrates and related SEMI Specification documents are extensive. In this brief article we outline the general contents of the SEMI Specifications for Si substrates referred to as SEMI M1-0302 SEMI M1.1-M1.15. Please refer to the link at the VSI web site (Technology Library) for SEMI M1-0302, M1.1-M1.15 in order to fully review in detail the actual specifications. The file is a PDF file containing text, figures, diagrams, and tables. The specifications cover the requirements for monocrystalline high purity silicon wafers used in the microelectronics and semiconductor industry. Terms, definitions, and all the specifications for wafer characteristics are included. These specifications are for single side polished wafers. US customary units are used to define 2” and 3” product, whereas SI (system international) units are designated for wafer diameters greater than 80mm. The PDF file contains the up-to-date SEMI specifications (as of June 2002) that have been technically approved by the Global Wafer Committee and are the responsibility of the North American Silicon Wafer Committee. B. Your Guide to SEMI M1-0302 The entire PDF file for SEMI-0302 is approximately 50 pages long. Pages 1-27 of this document contain text, tables, figures, and diagrams related to all the essential specifications for Si wafers as outlined by SEMI. The table below is a quick reference for locating the necessary information. General Topic General Details Page Numbers Terms and Definitions Many of the general and technical terms See pgs 1-10 used when describing Si Wafers or Si