原创力文档an annular mechanical temperature compensation structure for gas-sealed capacitive pressure sensor一个环形机械gas-sealed电容式压力传感器的温度补偿结构.pdfVIP
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an annular mechanical temperature compensation structure for gas-sealed capacitive pressure sensor一个环形机械gas-sealed电容式压力传感器的温度补偿结构
Sensors 2012, 12, 8026-8038; doi:10.3390/s120608026
OPEN ACCESS
sensors
ISSN 1424-8220
/journal/sensors
Article
An Annular Mechanical Temperature Compensation Structure
for Gas-Sealed Capacitive Pressure Sensor
Xiuchun Hao 1,*
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