I31微流道设计-德霖科技大学.DOCVIP

微流道蒸發現象之探討之範例 陳育堂 德霖技術學院機械系 摘 要 微流道二相對流熱傳可應用於許多領域如電子冷卻等，本研究利用技術於(110)矽晶片上100μm ~ 250μm之流道，流道，不同加熱功率以及工作角度下流體蒸發率並計算比較整體熱阻差異。Yu-Tang Chen Department of Mechanical Engineering, De Lin Institute of Technology Abstract Two-phase convective flow in micro channels has numerous promising applications such as electronic cooling. This study investigates evaporation phenomena and capillary-driven heat in a rectangular micro channels structure with hydraulic diameters of 100~250μm and length of 75mm. The micro channels made of (110)-orientated silicon is fabricated by bulk micromachining. The temperat