基于塞贝克效应的高响应度太赫兹探测器的研究-红外技术.PDF

第39 卷 第8 期 红 外 技 术 Vol.39 No.8 2017 年8 月 Infrared Technology August 2017 〈太赫兹技术〉 基于塞贝克效应的高响应度太赫兹探测器的研究 张 鹏，董 杰，韩顺利，吴 斌，曹乾涛 （中国电子科技集团公司第四十一研究所电子测试技术重点实验室，山东 青岛 266555 ） 摘要：针对微弱太赫兹激光功率的测试需求，本文研究一种可以提高太赫兹探测器响应度的方法。采 用反射式太赫兹时域光谱分析仪测试太赫兹激光吸收材料的吸收率，选择吸收率高的材料作为太赫兹 激光的吸收材料；使用直流磁控溅射技术在太赫兹激光吸收材料底部均匀的镀上一层金薄膜；利用具 有高导热率和高粘接强度的固化液体硅胶把太赫兹激光吸收材料与热电堆的热端粘接在一起，并把热 电堆的冷端与热沉紧密粘贴。理论分析和实验结果表明此方法有效提高了热电堆的热电转换率和吸收 材料对太赫兹激光的吸收率，从而使太赫兹探测器的响应度提升了 7.9%。因此，本文研制的太赫兹 探测器在0.1 THz～10THz 范围内，能够实现微瓦量级太赫兹激光功率的测试。 关键词：太赫兹探测器；太赫兹激光；响应度；塞贝克效应 中图分类号：O434.3 文献标识码：A 文章编号：1001-8891(2017)08-0761-05 High Responsivity Terahertz Detector Based on Seebeck Effect ZHANG Peng ，DONG Jie ，HAN Shunli ，WU Bin ，CAO Qiantao （Science and Technology on Electronic Test Measurement Laboratory, The 41st Research Institute of CETC, Qingdao 266555, China ） Abstract ：In this paper, we discuss a method that can improve terahertz (THz) detector responsivity for weak THz laser power tests. The absorption rate of THz laser absorption materials was measured by a reflective THz time domain spectrum analyzer. Then the material with the highest absorption rate was selected as the THz laser absorption material. A gold film was plated evenly on the bottom of the THz laser absorption material by using DC magnetron sputtering. For this study, we used silicone with a high thermal conductivity and high bonding strength to bond the THz laser absorption material and the hot end of thermopile together, and to bond the cold end of thermopile and heat sink together. Theoretical analysis and experimental results showed that this method effectively improved the thermoelectric conversion rate of the therm