Study of arrayed waveguide gratings in sheet optical interconnects片上光互连中阵列波导光栅研究.pdfVIP

摘要 摘要 目前，传统电互连的功耗、RC 时延、互连密度等问题使集成电路的发展出现 了巨大的瓶颈，光互连以高带宽、低损耗、小尺寸等特点受到广泛关注。波导光 互连能否使集成电路继续以“摩尔定律”规律发展，各个光子器件的小型化和高 性能化至关重要。波导光互连利用WDM 技术可以在波导中传输多个信号，这需 2 2 要复用/解复用器。AWG 近25 年的发展，尺寸方面从10cm 发展到0.01mm ，但 小型化仍是今后发展的方向。为了详细研究U 型AWG 的结构，本文根据一般U 型AWG 的布局公式，搭建了8×8、∆λ=0.8nm 的深U 型AWG ，并将其作为分析 和仿真实例。它的尺寸为67μm×195μm 。仿真结果显示，深U 型AWG 损耗在-1dB 左右，输出信道不一致性较低。通过三种优化波导布局的措施，本文提出一种M 型AWG ，理论上不会导致串扰的增加，损耗性能也不会大幅度下降。在保证引 入相同相位前提下，M 型AWG 一定程度上可以降低器件尺寸。 关键词：集成电路 片上光互连 波分复用 阵列波导光栅 结构布局 Abstract Abstract Recently, the development of the traditional electrical interconnect encounters huge bottleneck owing to some problems such as the power consumption, RC delay, and interconnect density and so on. Due to the advantages of high bandwidth, low loss, small size etc., optical interconnection has been attracted much attention. Whether optical waveguide interconnect technology makes IC continue in accordance with “Moore’s law” or not, it is most important that the miniaturization and high performances of the photonic devices. By utilizing the wavelength division multiplexing technology, multi-wavelength signals can be transmitted through one waveguide, so multiplexer/demultiplexer is quite necessary for optical waveguide interconnect system. In the progress of nearly twenty-five years, the size of AWG has 2 2 been decreased to the level of 0.01mm from 10cm . Despite this, miniaturization is still the study goals. In this paper, in order to study the structure o