一种新型单过硫酸氢钾磷酸微蚀体系在PCB微蚀中的应用-表面技术.PDFVIP

摇 第41卷摇 摇 第6期摇 摇 2012 年12 月 表面技术 摇 摇 摇 Vol.41摇 No.6摇 Dec.2012 SURFACE TECHNOLOGY 摇摇摇 75 一种新型单过硫酸氢钾/ 磷酸微蚀体系在PCB微蚀中的应用 伊洪坤 ,王维仁1 2 (1.东莞市富默克化工有限公司,东莞523000;2.东莞市仁吉电子材料有限公司,东莞523000) 摇 摇 [摘摇 要]摇 介绍了一种新型微蚀刻体系,其组分主要包括单过硫酸氢钾复合物、磷酸及稳定剂等,研究了温 度、组分用量、铜含量等因素对蚀刻的影响。 结果表明:温度对该蚀刻体系的影响较大,以37 ~43 益范围为宜;磷 酸在稳定剂的存在下可维持槽液pH值稳定,提高处理效果,其用量为1.6% ~2%时有利于蚀刻;单过硫酸氢钾 复合物在50 ~100 g/ L 为宜,通过控制其用量可获得所需的蚀刻量;铜含量对蚀刻速率影响较大,当铜含量上升 时,需不断添加微蚀液以维持一定蚀刻量。 与传统蚀刻体系相比,该微蚀刻体系具有蚀刻量低、更容易控制、药液 更稳定等特点,能更好地满足PCB蚀刻的要求。 [关键词]摇 单过硫酸氢钾;磷酸;稳定剂;微蚀刻 [中图分类号]TG176 摇 摇 摇 [文献标识码]A 摇 摇 摇 [文章编号]1001鄄3660(2012)06鄄0075鄄03 Study on the Application of New Potassium Monopersulfate and Phosphoric Acid Microetchant in PCB Industry 1 2 YI Hong鄄kun ,WANG Wei鄄ren (1.Formochem Applied Material Co. ,Ltd. ,Dongguan,523000 China; 2.Dongguan Renji Material Co. ,Ltd. ,Dongguan,523000 China ) [Abstract]摇 An advanced etching agent that contains Potassium Monopersulfate,phosphoric acid and stabilizing agent is introduced in this paper and the effect factors such as the temperature,concentration,copper content were studied during the etching process. The result indicatesthat the effect of thetemperature on etching rate isgreat,and the optimumtemperature is between 37 益 ~43 益,nottoohighortoolow;thephosphoricacidbetween1.6% to2% ismorehelpfulforetchingandstabi鄄 lized the pH value,improved the effect of thetreatment in the presence of the stabilizers;PPS content between50~100 g/ L is appropriate and flexibletocontroltheetchingrate;withtheincreaseof coppercontent,moremicroetch solutionmustbecontin鄄 ually added in order to maintain the required etching rate due to it爷s great impact