RF2PECVD聚合类聚乙烯氧(PEO2like)薄膜及其对血小板吸附性研究.PDFVIP

第 29 卷 　第 1 期 真 　空 　科 　学 　与 　技 　术 　学 　报 　　　　　　　 　　　　　　　　　　　 2009 年 1 、2 月 CHINESE JOURNAL OF VACUUM SCIENCE AND TECHNOLOGY 85 　 ( ) RFPECVD 聚合类聚乙烯氧 PEOlike 薄膜 及其对血小板吸附性研究 1 1 1 1 2 胡文娟 　谢芬艳 　付亚波 　陈　强 　翁 　静 ( 1 北京印刷学院印刷包装材料与技术北京市重点实验室 　北京 　102600 ;2 首都医科大学基础医学部 　北京 　100069) Surface Adsorption of PlateletRich Plasma of Polyethylene Oxide Like Fil ms 1 1 1 1 2 Hu Wenj uan ,Xie Fenyan ,Fu Yabo ,Chen Qiang ,Weng Jing ( 1L aboratory of Plasma Physics and M aterials , B eij ing Institute of Grap hic Communication , B eij ing 102600 , China ; n 2School of B asic Medical Sciences , Cap ital Medical University , B eij ing 100069 , China) c 　　Abstract 　The polyethylene oxide like ( PEOlike) functional films were polymerized by plasma enhanced chemical . deposition (PECVD) on ptype Si ( 100) substrates with ethylene glycol dimethyl ether ( EGDME) as the precursor . The continuous wave (CW) and pulsed plasmas were used . The influence of the film polymerization conditions ,such as plasma m power ,Ar flow rate ,pressure ,discharge (CW or pulsed) modes and substrate temperat