晶体硅太阳能电池的扩散工艺研究.docVIP

晶体硅太阳能电池的扩散工艺研究 摘要 近年来，太阳能电池的技术已经取得了很大的进展，很可能未来主要电力来源之一，因此研究太阳能电池尤其其光电转化效率有极其重要的意义。扩散制作p-n结是晶体硅太阳电池的核心，是电池质量好坏的关键之一。本文所研究的主要问题是低成本晶体硅太阳电池在工业化生产中的扩散制作p-n结工艺。 太阳电池制作中的工艺优化也是非常重要的。对于扩散工序而言，确保高效电池的高产能面临的最大问题在于如何保障扩散的均匀性，优化扩散的均匀性主要采取温区补偿技术。论文针对影响扩散均匀性的因素多且关联复杂等特点，重点对难于控制的气氛场因素进行系统实验研究，在气体流量、均流设计、炉内温度等方面提出了较好的优化实验方法，通过将实验方法应用于工业生产，扩散均匀性得到了非常好的控制。 从扩散均匀性对太阳电池电性能的影响角度，本论文通过实验分析了电池表面不同扩散均匀性对填充因子FF、并联电阻Rsh、串联电阻Rs、开路电压Uoc和转换效率Eff的影响。验证了通过改善扩散工艺提高太阳能电池的转换效率具有广阔的发展前景。 关键词：晶体硅太阳能电池，扩散工艺，均匀性，转换效率 The Diffudion Technology of Crystalline Silicon Solar Cell ABSTRACT Solar cell technology has made great progress, it might be called the main power source of the future, the study of solar cells in particular, the photoelectric conversion efficiency is extremely important.Diffusion mading p-n junction is the core of crystalline silicon solar cells, and is one of the key to the good and bad quality of the battery. The main problem of this paper is the low-cost industrial production of crystalline silicon solar cells in the production of p-n junction in the diffusion process. Optimization of solar cell production process is also very important. For the diffusion process, the biggest problem to ensure high efficient battery capacity is how to protect the spread of uniformity, optimization of the uniformity of spread mainly take the temperature compensation technology.In this paper,experiment methods are adopted for optimizing diffusion uniform by analyzing diffusion air-flowing environment．the air-flowing environment，which is comprised of quartz boat,quartz block,SiC paddle etc,is controlled difficultly． good experimental method of optimization is proposed in gas flow, current design, the furnace temperature and other aspects , by experimental methods appling to industrial production, the proliferation of uniformity has been very good control. From the proliferation of uniformity on the electrical properties of solar angle, this paper experimentally analyzed the proliferation of diffe