晶圆生长工艺.pdfVIP

Crystal Growth Yao-Joe Yang 1 Semiconductor Materials • Single crystal will be discussed in this section no grain boundary almost all atoms occupy well defined positions E.g., substrate of Si and GaAs • Amorphous no long range order E.g., Oxide • Polycrystalline small single crystal randomly oriented E.g., CVD Silicon 2 Crystal structure • Body centered cube (BCC) • Face centered cube (FCC) • Diamond structure : Si crystal Diamond structure 3 Tetrahedral bonding of silicon atoms Si Si Si Si Si 4 Crystallography • The Miller index • Mechanical properties of silicon is orientation dependent 5 Miller Indices (hkl) crystal plane [hkl] crystal direction {hkl} equivalent crystal plane hkl equivalent crystal direction e.g., {100} is equivalent to e.g., 110 is equivalent to (100), (010), (001) ... [110], [011], [101]... 6 Crystal Growth • 98% of total devices use sin