mcvd工艺制备光纤(制造工艺)(ppt).pptVIP

MCVD工艺关键技术 光纤的四大制造技术 VAD（轴向汽相沉积） OVD （外部汽相沉积） MCVD（改进的化学汽相沉积） PCVD（等离子体化学汽相沉积） MCVD工艺简介 MCVD工艺步骤1——Recipe Development Main variables for each process steps are following: Gas flows: bubbler carrier gas, O2, He, Cl2, SF6 etc. Preform temperature Carriage speed Sootbox pressure Ramping of relevant parameters MCVD工艺步骤2——Tube preparation Typical MCVD production tube is constructed from three quartz tubes, which are welded together prior to MCVD process. inlet tube: low quality quartz substrate tube: high quality synthetic silica, forms final preform exhaust tube: low quality